发明名称 |
Tandem piezoelectric actuator and single drive circuit for atomic force microscopy |
摘要 |
An apparatus for atomic force microscopy (AFM) comprises a first actuator configured to move a cantilever along an axis; a second actuator configured to move the cantilever along the axis; an amplifier; and a crossover network connected between the amplifier, and the first actuator and the second actuator. The crossover network is adapted to provide a first drive signal to the first actuator over a first frequency range and to provide a second drive signal to the second actuator over a second frequency range. |
申请公布号 |
US8291510(B2) |
申请公布日期 |
2012.10.16 |
申请号 |
US20100890894 |
申请日期 |
2010.09.27 |
申请人 |
AGILENT TECHNOLOGIES, INC. |
发明人 |
SCHROEDER DALE W.;TELLA RICHARD P. |
分类号 |
G01Q60/24 |
主分类号 |
G01Q60/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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