METHOD AND SYSTEM FOR PACKAGING A MEMS DEVICE

摘要

PURPOSE: A method for packaging a micro electro-mechanical device and a system thereof are provided to miniaturize a product and prevent the degradation of performance. CONSTITUTION: A pixel array includes two of interference modulators(12a,12b). A movable layer(14a) having high reflexibility in a left interference modulator is located away from a fixed layer(16a) having partial reflexibility in the left interference modulator. A movable layer(14b) having high reflexibility adjoins a fixed layer(16b) having partial reflexibility in the right interference modulator. The movable layers are formed by posts(18) and a series of parallel strips made of a metal layer deposited on a surface of sacrifice materials between the posts. [Reference numerals] (AA) 0 bolt; (BB) 10 bolt