| 摘要 |
PURPOSE: An apparatus for mixing supercritical fluid and chemicals and a method for supplying a supercritical fluid mixture using the same are provided to quantitatively mix the supercritical fluid and the chemicals by repeating the supercritical fluid and the chemicals using circulating pumps and circulating pipes. CONSTITUTION: An apparatus for mixing supercritical fluid and chemicals includes a plurality of mixing and storing tanks(10), circulating pipes(20), circulating pumps(30), first line mixers(40), tank supply controlling valves(50), and external supply controlling valves(60). The mixing and storing tanks store supercritical fluid and chemicals. The circulating pipes form paths through which the supercritical fluid and the chemicals circulate. The circulating pumps circulate the supercritical fluid and the chemicals through the circulating pipes. The first line mixers are installed on the circulating pipes and mix the supercritical fluid and the chemicals. The tank supply controlling valve supplies the supercritical fluid and the chemicals to one mixing and storing tank of the mixing and storing tanks. The external supply controlling valve supplies the mixture of the supercritical fluid and the chemicals from the mixing and storing tank to the external side of the apparatus.
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