| 摘要 |
A METHOD FOR ADJUSTING TEMPERATURE OF A MACHINING LIQUID, E.G., SLURRY, ETCHING LIQUID, BY PASSING THE MACHINING LIQUID THROUGH A HEAT EXCHANGER (30). THE HEAT EXCHANGER (30), WHICH ADJUSTS TEMPERATURE OF THE MACHINING LIQUID, INCLUDES A CERAMIC HEAT EXCHANGING TUBE (32) WHICH IS MADE BY BAKING SILICON CARBIDE (SIC). |
