发明名称 CLAMP UNIT AND APPARATUS FOR MANUFACTURING MASK ASSEMBLY HAVING THE SAME
摘要 PURPOSE: A clamp unit and a mask assembly manufacturing apparatus including the same are provided to improve the reliability of a product by griping a mask and providing tension to prevent the sag of the mask. CONSTITUTION: A base part(320) guides a sliding reciprocation of a clamp body. A clamping unit(330) rotates between a mask gripping location and a mask releasing location. A driving unit(350) includes a first driving unit(352) and a second driving unit(354) to generate the driving force of a translation. A driving converting unit(360) converts the driving force of the translation of the first driving unit into a rotational force. A frication member(340) increases friction between a mask and a grip surface.
申请公布号 KR20120113574(A) 申请公布日期 2012.10.15
申请号 KR20110031346 申请日期 2011.04.05
申请人 KPS CO., LTD. 发明人 KIM, JUNG HO
分类号 H01L51/56;C23C14/04;H05B33/10 主分类号 H01L51/56
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