Silicon transducer for use in sensor utilized to measure e.g. pressure, has contacts arranged at end of slab to measure bridge output voltage, and silicon mounting surfaces arranged at ends of transducer in electrically neutral region

摘要

The transducer (1) has a silicon slab (2) comprising four integrated piezoresistive resistors (3.1-3.4) that are interconnected in a wheatstone full bridge. The resistors are arranged such that a minimum spacing is provided between two of the resistors, and a larger spacing is provided between the other two resistors. A pair of contacts (4.1, 4.2) is arranged at an end of the silicon slab to measure bridge output voltage (Ud). Silicon mounting surfaces (7) are arranged at two ends of the transducer in an electrically neutral region.