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发明名称
FILM FORMING DEVICE
摘要
申请公布号
KR101191569(B1)
申请公布日期
2012.10.15
申请号
KR20100061602
申请日期
2010.06.29
申请人
发明人
分类号
C23C14/24;H01L51/56
主分类号
C23C14/24
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代理人
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