FRAME OF LARGE PELLICLE AND GRASPING METHOD OF FRAME,申请号KR20097026229-传众专利搜索

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发明名称	FRAME OF LARGE PELLICLE AND GRASPING METHOD OF FRAME
摘要
申请公布号	KR101191055(B1)	申请公布日期	2012.10.15
申请号	KR20097026229	申请日期	2008.07.02
申请人		发明人
分类号	H01L21/027;G03F1/64	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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