| 摘要 |
PURPOSE: A method for forming a substrate and the substrate thereof are provided to reduce manufacturing costs by recycling a single crystal substrate. CONSTITUTION: A deposition layer is formed on a single crystal substrate(S20). An Al film is deposited on the deposition layer(S30). The Al film is oxidized and crystallized as a single crystal(S40). The oxidized and crystallized Al2O3 is separated(S50'). The separated single crystal Al2O3 is attached to a support substrate(S60'). [Reference numerals] (AA) Substrate manufacture completion; (S10) Preparing a single crystal substrate; (S20) Adding a deposition layer; (S30) Depositing an aluminum layer; (S40) Oxidation and single crystallization; (S50) Separating a single crystallized film; (S60) Attaching a separated film to a support substrate
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