| 摘要 |
PURPOSE: A method for manufacturing a fluid spraying head is provided to weld a piezoelectric substrate on a base substrate, thereby obtaining the strength of the piezoelectric substrate. CONSTITUTION: A method for manufacturing a fluid spraying head is as follows. A piezoelectric substrate composed of a plurality of high dielectric material in which lateral surfaces are closely adhered is welded on a base substrate composed of low dielectric materials so that a laminated substrate is formed(S1). A plurality of grooves is formed on the laminated substrate(S3). The groove has width reaching to the base substrate and is formed to be parallel to a longitudinal direction of the adhered lateral surfaces. The adhered lateral surfaces are eliminated when forming a groove. A driving electrode is formed on the lateral surface(S4). The laminated substrate is covered with the groove so that a cover plate is welded(S5). A nozzle plate is welded on the laminated substrate(S6). [Reference numerals] (S1) Laminated substrate forming process; (S2) Flattening process; (S3) Groove forming process; (S4) Electrode forming process; (S5) Cover plate welding process; (S6) Nozzle plate welding process |
