A PIEZO-DRIVEN HIGH STIFFNESS STAGE WITH BUFFER MODULE

摘要

PURPOSE: A piezo-driven high stiffness stage including a buffer module is provided to accurately operate a device by precisely controlling a moving plate using a piezoelectric actuator. CONSTITUTION: A moving plate is arranged in a housing. A linear guide unit(130) includes a guide bar, the housing, the moving plate, and a plurality of first elastic hinges and second elastic hinges which connect the guide bar. A plurality of piezoelectric actuators(140) are formed in the center of the moving plate which is vertical to the linear guide unit and generate piezoelectric force by a voltage difference. A buffer module(150) is arranged between the moving plate and the piezoelectric actuator.