| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain an inkjet head that can maintain the electrical insulation between ink and an electrode, is excellent in print quality, and in durability. <P>SOLUTION: The inkjet head includes a substrate composed of piezoelectric materials that have a plurality of grooves; and a nozzle plate that is fixed to an end face of the substrate by an adhesive agent. The nozzle plate includes a plurality of nozzles that occlude an end along the longitudinal direction of the groove, and are carried out laser processing to communicate with the grooves. Electrodes to which the drive voltage is applied are formed on internal surfaces of the grooves of the substrate. The electrode is formed of a plurality of metal layers that are mutually laminated to cover the internal surfaces of the grooves, and the surface that is apart from the internal surfaces of the grooves are planarized. A first inorganic film is superposed on the surfaces of the electrodes. A second inorganic film that is exposed in the groove and soaked in the ink supplied to the groove is superposed on the first inorganic film. <P>COPYRIGHT: (C)2013,JPO&INPIT |
