SUBSTRATE ONE-SIDED CONVEYING MECHANISM IN SUBSTRATE VISUAL INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a substrate one-sided conveying mechanism for use in a substrate visual inspection device that not only is capable of conveying an inspection object substrate in a correct conveying attitude in a clean state while achieving cost reduction but also excels in durability.

SOLUTION: A substrate one-sided conveying mechanism comprises: a pair of endless conveyor belts 13 and 14 that convey an inspection object substrate 51; and a reference side substrate guide 23 and a movable side substrate guide 33 arranged with a substrate conveying face 19 in-between. On an inside face 24 of the reference side substrate guide 23, a guide slope 26 rising forward is disposed; a level-gapped face 36 whose face height is lower than a face height of a rear inside face 34b is disposed on a front inside face 34a of the movable side substrate guide 33; an elastic contact part 37 formed of a plurality of thin sheet spring pieces 38 inclined forward and arranged in a longitudinal array is arranged on the level-gapped face 36; this configuration enables orientation and position of the inspection object substrate 51 to be corrected while conveying the substrate pulling over toward the reference side substrate guide via the elastic contact part 37 and to deliver the substrate toward an inspection camera 42.

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