| 摘要 |
A position sensor for ascertaining the fine position value z of a movable body includes an exciter unit moving therewith and a stationary sensor unit (7) which simultaneously delivers a plurality of output signals aE(z(t)), bE(z(t)), . . . jointly describing the fine position value. In the calibration mode there is a defined relationship between the exciter unit and a calibration unit (31) and groups of amplitude values &Dgr;aE(z), &Dgr;bE(z), . . . are taken off from the output signals and groups of average values AE(z), BE(z), . . . are formed therefrom, which are fed to the calibration unit (31) which converts them into reference values AE(μ(z)), BE(μ(z)), . . . using the calibration fine position values μ(z) and stores same with the associated fine position value μ(AE, BE, . . . ) as an associated values multiplet in a comparative value memory (14). In the measuring mode to ascertain a fine position value groups of amplitude values &Dgr;aM(z), &Dgr;bM(z), . . . are taken off from the output signals aM(z(t)), bM(z(t)), . . . , from which groups of measuring values AM(z), BM(z), . . . are produced by averaging and are fed to a computing unit (10), which forms differences of cross products from the reference values of varying groups of reference values and the current measuring value group and causes said differences to go towards zero to ascertain the current fine position value. |
