ACTIVE SPECIES EMISSION UNIT AND ACTIVE SPECIES EMISSION DEVICE EMPLOYING SAME

摘要

An active species emission unit comprises: a case unit having either a cylindrical or box shape, further comprising an aperture unit on one end thereof; a discharge electrode, a leading end whereof is inserted via the aperture unit into the case unit; and a semiconductor electric unit which is positioned vertically facing the discharge electrode in the vicinity of the leading end thereof. A power source connection unit which serves as a ground potential is positioned on the exterior periphery of the semiconductor electric unit. Voltage is applied from a power source unit to the power source connection unit and the discharge electrode and an active species emitted by a corona discharge.