| 摘要 |
<P>PROBLEM TO BE SOLVED: To detect the rotation angle of a mirror by suppressing the decrease of the planar precision of the reflection surface of the mirror. <P>SOLUTION: The fixed ends of detection members 16a and 16b are connected to a part of the end of a mirror 12 in the vicinity of the connection part of the mirror 12 and a torsion bar spring 13. Each detection member is formed in such a manner that a piezoelectric member 16-1 is laminated on one surface of a cantilever. Each detection member is connected to the end of a part of the mirror 12 by a fixed end 16-4 in a connection part C. Each detection member is extended in a direction nearly orthogonal to the rotation axis of the mirror 12. When the mirror 12 is rocked, the free end of a detection member 16 receives an inertia force by the rocking of the mirror through the fixed end 16-4, so that the respective detection members 16a and 16b are rocked and the piezoelectric member 16-1 is extended and contracted. A potential difference is made between the upper and lower surfaces of the piezoelectric member 16-1 and has a certain correlation with the deformation of the mirror 12. Therefore, a potential difference signal is calculated to detect the rotation angle of the mirror 12. <P>COPYRIGHT: (C)2013,JPO&INPIT |
