COVER STRUCTURE FOR CRYOPUMP, CRYOPUMP, START-UP METHOD OF CRYOPUMP, AND STORAGE METHOD OF CRYOPUMP

摘要

A storage method of a cryopump is provided, the storage method including: closing, with a pump cover, a pump inlet in the cryopump for receiving gases to be pumped by the cryopump; and reducing a pressure in the cryopump through a fluid channel for communicating an interior of the cryopump to an exterior of the cryopump. A start-up method of a cryopump is also provided, the start-up method including releasing a negative pressure in the cryopump by removing a closing member from a cover main body of a pump cover mounted to the cryopump.