| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a flow velocity sensor installable in an area of a small flow path. <P>SOLUTION: A flow velocity sensor 10 having a case 12 formed by setting a dynamic pressure inlet 74 in a fluid flowing direction and static pressure inlets 86 and 88 in a direction almost orthogonal to the fluid flowing direction includes: a first bellows 36 for sealing a first pressure inlet 16; a second bellows 40 for sealing a second pressure inlet 24; a partition plate 46 and a piezoelectric vibrator 50 constituting pressure detection means for detecting a difference between forces received from first pressure receiving means and second pressure receiving means; an internal space 70 disposed to face the first pressure inlet 16 in the case 12 and having the dynamic pressure inlet 74; and ann internal space 82 disposed to face the second pressure inlet 24 in the case and having the static pressure inlets 86 and 88. The first pressure means receives pressure from a dynamic pressure introduction chamber, and the second pressure receiving means receives pressure from the internal space 82. <P>COPYRIGHT: (C)2013,JPO&INPIT |
