发明名称 |
PLACE STATION FOR A PICK-AND-PLACE MACHINE |
摘要 |
A place station for a pick-and-place machine, comprising: a place stage assembly comprising a place stage for supporting a substrate; a covering for providing a clean environment at the substrate, the covering comprising a first opening in a first face of the covering through which a placement operation may be performed to a limited area of the substrate; wherein the place stage and the covering are mounted for relative movement to allow the opening to achieve a selected relative position over the substrate. |
申请公布号 |
US2012255161(A1) |
申请公布日期 |
2012.10.11 |
申请号 |
US201013498582 |
申请日期 |
2010.09.28 |
申请人 |
VAN DER DONCK JACQUES COR JOHAN;DE JAGER PIETER WILLEM HERMAN;NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO |
发明人 |
VAN DER DONCK JACQUES COR JOHAN;DE JAGER PIETER WILLEM HERMAN |
分类号 |
H01L21/68;H01L21/00;H05K13/04 |
主分类号 |
H01L21/68 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|