| 摘要 |
PURPOSE: A cassette for loading a substrate is provided to suppress particles by installing a protection guard for low friction in the bottom of a bottom frame. CONSTITUTION: Variable frames are installed on the upper and lower sides of one side and the other side of a receiving space to vary a position thereof in left and right directions. A position control member(440) is fixed between an upper variable frame and a lower variable frame and includes a substrate support frame(430) and a position control unit. A substrate support frame includes a plurality of substrate holders(431). The position control unit controls the position of the variable frame in left and right directions. A groove is formed by bending a bottom frame(200).
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