发明名称 CASSETTE FOR SUBSTRATE LOADING
摘要 PURPOSE: A cassette for loading a substrate is provided to easily load a large substrate with a vertically downward method by controlling a distance between two pins. CONSTITUTION: Side support units(20) are arranged on both sides of the upper side of a frame(10) to face each other and prevents the vertically loaded substrate from falling. A bottom support unit(30) is arranged on the lower side of the frame and supports the lower side of the substrate which is vertically loaded. The side support unit includes two support pins(23a,25a) protruded from both sides of the substrate which is vertically loaded to prevent the vertically loaded substrate from falling and controls a distance between two support pins.
申请公布号 KR101189524(B1) 申请公布日期 2012.10.11
申请号 KR20120011493 申请日期 2012.02.03
申请人 C.M.T CO., LTD.;MM TECH CO., LTD. 发明人 CHANG, SEUNG IL;HWANG, DOO YEOUN
分类号 H01L21/673 主分类号 H01L21/673
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