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发明名称
MOUNTING TABLE STRUCTURE AND PROCESSING APPARATUS
摘要
申请公布号
KR20120112661(A)
申请公布日期
2012.10.11
申请号
KR20127019798
申请日期
2010.12.20
申请人
TOKYO ELECTRON LIMITED
发明人
KAWASAKI HIROO;SAITOU TETSUYA;NAGAOKA HIDEKI;MURAOKA TAKASHI;YAMAMOTO HIROHIKO
分类号
H01L21/683;H01L21/205
主分类号
H01L21/683
代理机构
代理人
主权项
地址
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