DEVELOPER-SOLUBLE MATERIALS AND METHODS OF USING THE SAME IN VIA-FIRST DUAL DAMASCENE APPLICATIONS,申请号KR20067007008-传众专利搜索

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发明名称	DEVELOPER-SOLUBLE MATERIALS AND METHODS OF USING THE SAME IN VIA-FIRST DUAL DAMASCENE APPLICATIONS
摘要
申请公布号	KR101189397(B1)	申请公布日期	2012.10.11
申请号	KR20067007008	申请日期	2004.10.15
申请人		发明人
分类号	H01L21/28;H01L;H01L21/4763	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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