| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate processing device and a power source management method that can reduce electric power consumption. <P>SOLUTION: A substrate processing device 1 comprises: a plurality of units IR, SH, CR, MPC, and CC that execute processes for processing a substrate; a plurality of ON/OFF switching devices 22 that respectively correspond to the plurality of units and switch between an ON state where an electric power is supplied to the corresponding units and an OFF state where the electric power to the corresponding units is stopped; and a main controller 6 that obtains production information including the processing contents of the substrate to be fed to the substrate processing device 1 and a deadline, creates a time chart showing the operation plan of the plurality of units based on the production information so that all the processes executed by the plurality of units according to the processing contents finish by the deadline, and operates the plurality of units based on the time chart while controlling the plurality of ON/OFF switching devices 22 based on the time chart. <P>COPYRIGHT: (C)2013,JPO&INPIT |
