| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate processing device capable of preventing breakage of a temperature detection tube due to vibrations and the like during an earthquake. <P>SOLUTION: A substrate processing device comprises: a boat for laminating and holding a plurality of substrates at intervals in a vertical direction; a reaction tube for housing the boat and processing the substrates held on the boat; a heating part installed around the reaction tube and heating the substrates housed in a processing chamber; a temperature detection tube that extends in a vertical direction between the reaction tube and the heating part and in which a temperature detection element is built; a processing gas supply part for supplying processing gas in the reaction tube; and an exhaust part for exhausting the gas from the reaction tube. One end of the temperature detection tube is fixed to the substrate processing device, and a first cushioning material for restraining collision on the reaction tube is mounted on the other end of the temperature detection tube and around the temperature detection tube. <P>COPYRIGHT: (C)2013,JPO&INPIT |
