发明名称 MONOLITHIC INTEGRATED CAPACITORS FOR HIGH-EFFICIENCY POWER CONVERTERS
摘要 A semiconductor structure such as a power converter with an integrated capacitor is provided, and comprises a semiconductor substrate, a high-side output power device over the substrate at a first location, and a low-side output power device over the substrate at a second location adjacent to the first location. A first metal layer is over the high-side output power device and electrically coupled to the high-side output power device, and a second metal layer is over the low-side output power device and electrically coupled to the low-side output power device. A dielectric layer is over a portion of the first metal layer and a portion of the second metal layer, and a top metal layer is over the dielectric layer. The integrated capacitor comprises a first bottom electrode that includes the portion of the first metal layer, a second bottom electrode that includes the portion of the second metal layer, the dielectric layer over the portions of the first and second metal layers, and a top electrode that includes the top metal layer over the dielectric layer.
申请公布号 US2012256193(A1) 申请公布日期 2012.10.11
申请号 US201113165396 申请日期 2011.06.21
申请人 HEBERT FRANCOIS;GAUL STEPHEN J.;PETRICEK SHEA;INTERSIL AMERICAS INC. 发明人 HEBERT FRANCOIS;GAUL STEPHEN J.;PETRICEK SHEA
分类号 H01L29/02;H01L21/02;H01L29/06;H01L29/92 主分类号 H01L29/02
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