| 摘要 |
PURPOSE: A substrate processing apparatus is provided to improve throughput by transferring a substrate using a first transfer tool and a second first transfer tool at the same time. CONSTITUTION: A receiving container which is acceptable a plurality of substrates is carried into and out of an indexer block(11). A processing block performs predetermined processing to the plurality of substrates. The indexer block comprises a container placement part, a first transfer tool(IR1), and a second transfer tool(IR2). The receiving container is replaced in the container placement part. The first transfer tool and the second transfer tool transfer the plurality of substrates at an interval between the receiving container and the processing block. |
