| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate conveying device that is suitable for the high speed conveyance of a substrate. <P>SOLUTION: A substrate processing apparatus includes hands 23A, 23B for holding the substrate; hand drive mechanisms 20, 26, 27 for driving the hands 23A, 23B; and an operation auxiliary units 10A, 10B having gas nozzles for ejecting gas to assist the operation of the hands 23A, 23B. The operation auxiliary units 10A, 10B are included in the hands 23A, 23B, and assist the operation of the hands 23A, 23B using a reaction force caused by a gas ejection. <P>COPYRIGHT: (C)2013,JPO&INPIT |
