| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a probing device capable of automatically probing with an inexpensive configuration and simple control with no problem even when an interval between measurement points of objects to be measured is a narrow pitch in the electric characteristics test of an electronic component in need of multipoint waveform measuring. <P>SOLUTION: The lower ends of multiple both-end contact probes 3 that are vertically fixed and supported onto a support structure 5 are set in contact onto a number of measurement points 2 of an object to be measured that an object 1 to be measured owns, and the upper ends are set in contact onto an S face pad 9 of a measurement circuit substrate 8. C face signal pads 10a and 10c and C face GND pads 11a and 11b in the both ends in Y axis direction of the measurement circuit substrate 8 are provided for a predetermined number in X axis direction. Probes 12a and 12b that probe them and contact probes 13a and 13b are subjected to movement control at least in Z axis direction in two axes, X axis and Z axis. The measurement circuit substrate 8 has a circuit configuration capable of transmitting an electrical signal at the measurement point transmitted to an arbitrary S face pad 9 to a surface signal pad. <P>COPYRIGHT: (C)2013,JPO&INPIT |
