| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a flow velocity sensor capable of accurately measuring the flow velocity of fluid even when a temperature changes. <P>SOLUTION: A flow velocity sensor 10 configured by directing a dynamic pressure inlet 74 in a fluid flowing direction and static pressure inlets 86 and 88 in a direction almost orthogonal to the fluid flowing direction includes: hollow bellows 36 and 40 having both ends set as openings; a partition plate for partitioning a space in the bellows and transmitting a force toward a combined force of forces received from the two partitioned spaces; a piezoelectric vibrator 50 receiving the force from the partition plate to change a resonance frequency; and an integrated circuit 100 for driving the piezoelectric vibrator to output an oscillation signal and compensating for the temperature of the oscillation signal. Temperature measuring means is disposed adjacently to the piezoelectric vibrator in an internal space. The integrated circuit compensates for the temperature based on temperature information acquired from the temperature measuring means. <P>COPYRIGHT: (C)2013,JPO&INPIT |
