METHODS AND APPARATUSES FOR ROLL-ON COATING

摘要

Coating rollers accepting liquid media provide liquid chemicals to substrates for depositing a thin coating layer on the flat substrates, such as semiconductors or panels. The liquid delivery system can control the flow and the pressure of the liquid to achieve optimum process condition with minimum excess waste. Rollers with non-uniform distribution of liquid media can provide a non-uniform thickness profile on the substrates, which can be used to compensate for the non-uniformity of subsequent processes. The liquid media is cooled to a life-preserving temperature while shielded from the thermal energy heating the substrates to prevent degrading the liquid media. Physical barrier or temperature barrier can be established in vicinities of die rollers to further limit exposing the liquid media to high temperature.