Method for Drying Thin Films in an Energy Efficient Manner

摘要

A method for drying a thin film stack having a thin film located on a substrate is disclosed. The thin film stack is conveyed past a flashlamp during which the thin film stack is irradiated with a composite light pulse from the flashlamp. The composite light pulse is composed of multiple micropulses. The time duration of the composite light pulse is shorter than a total thermal equilibration time of the thin film stack. In addition, when the thin film stack is being conveyed past the flashlamp, the thin film stack should move less than 10% of the length of the irradiating area in the conveyance direction during the delivery of the composite light pulse.