| 摘要 |
<p>A mixture containing methyldichlorosilane, tetrachlorosilane and trichlorosilane is distilled, and a fraction of the distillate with higher methyl dichlorosilane content than the mixture before distillation is obtained. This distillate fraction is heated, redistributing the chlorine between methyldichlorosilane and tetrachlorosilane, and methyldichlorosilane is converted into methyltrichlorosilane. The fraction after redistribution, which includes this methyltrichlorosilane, is purified by distillation, and high-purity trichlorosilane is separated out. The boiling point of methyldichlorosilane (41°C) is close to the boiling point of the trichlorosilane (32°C) that is being purified by distillation; therefore, elimination is difficult. In this method, the redistribution of chlorine involving tetrachlorosilane converts the methyldichlorosilane to methyltrichlorosilane (boiling point 66°C), making elimination simple.</p> |
