| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problems of a teaching method according to the prior art that a long time is required and the work accompanied by a change in air pressure is inefficient because the operation of adjusting the position, evacuating a process chamber, confirming the misalignment by means of a microscope, returning the process chamber to the atmospheric state, and then adjusting the position again is repeated, and that the error is large in the visual inspection by a user using the microscope. <P>SOLUTION: A CCD camera 31 is used in place of a microscope, a first image marker A corresponding to the reference position of a heater is used, and a second image marker B provided on a corresponding adapter ring adjustment jig 17 is used in place of the center position of a shadow ring 18. The position of the adapter ring adjustment jig 17 is adjusted by measuring these two image markers A and B by means of the CCD camera 31. <P>COPYRIGHT: (C)2013,JPO&INPIT |
