发明名称 ABNORMAL FACTOR IDENTIFICATION METHOD AND DEVICE, PROGRAM FOR CAUSING COMPUTER TO EXECUTE ABNORMAL FACTOR IDENTIFICATION METHOD, AS WELL AS COMPUTER-READABLE RECORDING MEDIUM UPON WHICH PROGRAM IS RECORDED
摘要 <p>In this abnormal factor identification method, for each article of manufacture, manufacturing data for the article of manufacture and inspection data representing the quality obtained at the inspection step are associated and acquired as a data set (S1 and S2). Among the data sets, from among manufacturing data for satisfactory articles and manufacturing data for defective articles, multivariate analysis is performed thereupon to extract at least one feature value that best represents the manufacturing conditions of the article of manufacture, and on the basis of the extracted feature value, an abnormal factor candidate is extracted from among the manufacturing data (S3). Each of the manufacturing data which are abnormal factor candidates are extracted from the data sets, and statistical tests are performed regarding whether or not the manufacturing data impart an effect upon quality (S4-1). The results acquired by way of the testing step are displayed on the basis of input or on the basis of pre-defined criteria (S4-2).</p>
申请公布号 WO2012137775(A1) 申请公布日期 2012.10.11
申请号 WO2012JP59072 申请日期 2012.04.03
申请人 SHARP KABUSHIKI KAISHA;CHIBA, SHUICHIRO;SHIMIZU, KAZUTOSHI 发明人 CHIBA, SHUICHIRO;SHIMIZU, KAZUTOSHI
分类号 G05B19/418;H01L21/02;H01L21/66 主分类号 G05B19/418
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