| 摘要 |
<p>PURPOSE: A measuring apparatus and a plasma processing apparatus are provided to broaden a range of a measurable subject by increasing wavelength resolution. CONSTITUTION: A first mirror(102) and a second mirror(106) are installed to reflect incident light to a desired direction. The light reflected from the second mirror enters a photodiode array(108). The incident light from an entrance slit(101) is reflected to the first mirror and is irradiated to a diffraction grid(104). The photodiode array detects power of the light. A controller(120) comprises a driving part(124), a measuring part(126), and a memory part(128). [Reference numerals] (100) Spectroscope; (120) Controller; (121) Synchronization part; (122) Driver; (124) Drive part; (126) Measuring part; (128) Memory part; (AA) Light entering</p> |
