VACUUM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC EL DISPLAY DEVICE

摘要

PURPOSE: A method for manufacturing a vacuum deposition apparatus and an organic EL(Electroluminescence) display device is provided to prevent the climbing of aluminum using glass of ceramic material. CONSTITUTION: A substrate installation device arranges a substrate lengthways. An evaporation source heat(3-2) is comprised of two or more evaporation sources(3-1) arranged lengthways. A part of the evaporation source is opened in order to emit steam vapor(2). A longitudinal axis of each evaporation source is tilted to a direction same as a horizontal direction. The evaporation source row relatively moves from the substrate as 1axis. The evaporation source row comprises a valve capable of blocking air.