METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS,申请号KR20110120253-传众专利搜索

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发明名称	METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
摘要
申请公布号	KR101189495(B1)	申请公布日期	2012.10.11
申请号	KR20110120253	申请日期	2011.11.17
申请人		发明人
分类号	H01L21/314;H01L21/205;H01L21/8247;H01L27/115	主分类号	H01L21/314
代理机构		代理人
主权项
地址

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