| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve such a problem that an electrostatic type charged particle beam lens is sensitive in astigmatism to the symmetry of an opening shape, and likely to be broken in a manufacturing process. <P>SOLUTION: The electrostatic type charged particle beam lens includes a flat plate having a first surface with an optical axis direction as a normal line and a second surface opposite to the first surface, and has an electrode having a through-hole penetrating through from the first surface to the second surface. An opening surface on the surface perpendicular to the normal line of the through-hole is formed to have an opening cross-section. When the diameter of circle obtained by regression analysis of the opening cross-section is regarded as a representative diameter, the representative diameter of the opening cross-section in a first region on the first surface side and the representative diameter of the opening cross-section in a second region on the second surface side are respectively larger than that in a third region which is a region inside the electrode sandwiched between the first surface and the second surface. <P>COPYRIGHT: (C)2013,JPO&INPIT |
