发明名称 METHOD FOR DRYING A SUBSTRATE
摘要 A method for drying workpieces includes immersing the workpieces in a liquid bath, raising the workpieces with a first holder until a central opening of the workpieces is visible above liquid surface, then using a dry second holder rod inserted through said central opening to continue raising process. Due to this, a drying portion of the workpieces is not held by a wet holding mechanism.
申请公布号 US2012255191(A1) 申请公布日期 2012.10.11
申请号 US201213463880 申请日期 2012.05.04
申请人 INVENPRO (M) SDN. BHD. 发明人 NG KAE JENG;LIANG KIEN HUI;LIANG KIEN YEW
分类号 F26B19/00 主分类号 F26B19/00
代理机构 代理人
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