Embodiments of embedded MEMS sensors and related methods are described herein. Other embodiments and related methods are also disclosed herein.
申请公布号
US2012256237(A1)
申请公布日期
2012.10.11
申请号
US201213523755
申请日期
2012.06.14
申请人
LAKAMRAJU NARENDRA V.;VENUGOPAL SAMEER M.;STATE UNIVERSITY;ARIZONA BOARD OF REGENTS, A BODY CORPORATE OF THESTATE OF ARIZONA, FOR AND ON BEHALF OF ARIZONA
