| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technology capable of restraining an atmosphere in a FOUP (Front-Opening Unified Pod) transfer area from being mixed into a substrate transfer area via an internal space of a lid. <P>SOLUTION: A purge gas discharge portion provided in an opening/closing door makes an entry into an internal space of a lid via a front-side opening of the lid in a state in which an opening edge of a substrate extraction opening of a FOUP is brought into intimate contact with an opening edge of a transfer opening opened/closed by the opening/closing door. Purge gas is discharged into the internal space, and that atmosphere is forcedly discharged from an opening different from the opening into a closed space that is formed between the FOUP and the opening/closing door. This prevents the atmosphere in a FOUP transfer area from being carried into a substrate transfer area via the internal space. <P>COPYRIGHT: (C)2013,JPO&INPIT |
