| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical device, a wavelength variable filter module and an optical spectrum analyzer, having increased flexibility in designing and reducing the cost as well as achieving excellent dimensional accuracy, and capable of carrying out wavelength separation with high accuracy for a long period of time. <P>SOLUTION: A first substrate 2 on which a movable plate 21 having a first light-reflecting part 25 is disposed as displaceable, and a second substrate 3 on which a second light-reflecting part 34 opposing to the first light-reflecting part 25 are joined by a joint film 41. The joint film 41 contains a Si skeleton containing a siloxane (Si-O) bond and a random atomic structure, and a leaving group bonded to the Si skeleton. By imparting energy to at least a partial region of the joint film 41, the leaving group present near the surface of the joint film 41 leaves from the Si skeleton and adhesiveness is developed in the region on the surface of the joint film 41, which joins the first substrate 2 and the second substrate 3. <P>COPYRIGHT: (C)2013,JPO&INPIT |
