摘要 |
A single-ended DC linear accelerator for the generation of high-current, high-energy ion beams of H, D or He includes an ion source located in a high-voltage terminal for the creation of the ion beam, an analyzing magnet to purify the ion beam, an accelerating tube and DC high-voltage power supply for accelerating the ions of interest to high energies and a separate pumping tube that transports the vast majority of the neutral gas from the ion source at high-voltage towards a vacuum pump at ground potential, thereby preventing the adverse influence of increased vacuum pressure inside the accelerating tube to facilitate stable acceleration of high-current beams to high energies in single-ended DC linear accelerators. The resulting high-current accelerator for H, D or He has diverse applications, including ion beam cancer therapy, cyclotron injection, silicon cleaving, ion implantation in semiconductor devices and NRA.
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