| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a cured film capable of forming a cured film having excellent surface curability and deep curability even in the case of using an ultraviolet curing apparatus of an ultraviolet LED curing system while suppressing sublimation of a photopolymerization initiator. <P>SOLUTION: A method for forming a cured film comprises (1) a step of coating a radiation-sensitive resin composition on a substrate to form a coated film, (2) a step of exposing the coated film through a photomask, (3) a step of developing the exposed coated film and (4) a step of heating the developed coated film. The radiation sensitive resin composition contains [A] an alkali-soluble resin, [B] a polymerizable compound having an ethylenically unsaturated bond, [C] a photopolymerization initiator and [D] an acid generator, and in the above step (2), the coated film is exposed using an ultraviolet LED as a light source. <P>COPYRIGHT: (C)2013,JPO&INPIT |
