WARP CHECKING DEVICE AND WARP CHECKING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a warp checking device and a warp checking method that can check the warp direction of an object to be checked formed in a planar shape in a simple configuration.

SOLUTION: When an external edge part 22 of a planar ceramic substrate 20 mounted on a planar part 11a is pressed by an actuator 12 and the rotation of the ceramic substrate 20 after it is released from the pressing force is detected by a photosensor 13, the warp direction of the ceramic substrate 20 in which a central part 21 is convex toward the planar part 11a relative to the external edge part 22 (a warp direction of being convex downward) is detected.

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