发明名称 |
METHOD TO AVOID FIXED PATTERN NOISE WITHIN BACKSIDE ILLUMINATED (BSI) COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR (CMOS) SENSOR ARRAY |
摘要 |
The present disclosure provides one embodiment of a method. The method includes providing a semiconductor substrate having a front side and a backside, wherein the front side of the semiconductor substrate includes a plurality of backside illuminated imaging sensors; bonding a carrier substrate to the semiconductor substrate from the front side; thinning the semiconductor substrate from the backside; performing an ion implantation to the semiconductor substrate from the backside; performing a laser annealing process to the semiconductor substrate from the backside; and thereafter, performing a polishing process to the semiconductor substrate from the backside.
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申请公布号 |
US2012258564(A1) |
申请公布日期 |
2012.10.11 |
申请号 |
US201113079995 |
申请日期 |
2011.04.05 |
申请人 |
WANG CHUNG CHIEN;TU YEUR-LUEN;TSAI CHIA-SHIUNG;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
WANG CHUNG CHIEN;TU YEUR-LUEN;TSAI CHIA-SHIUNG |
分类号 |
H01L31/18;H01L21/00;H01L21/304;H01L21/306 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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