| 摘要 |
<p>PURPOSE: A substrate transfer device, a substrate transfer method, and a substrate processing device are provided to reduce time for transferring a substrate by calculating arrival time of a holding support member to a substrate transferring position. CONSTITUTION: A substrate transfer device(13) transfers a wafer(W) between a carry-in/out stage(12) and load-lock chambers(14,15). Two loading tables(16a,16b) respectively loading the wafer are installed within the load-lock chamber. A vacuum transfer chamber(1) is installed on a rear side of the load-lock chamber. A transfer arm(20) comprises a bottom arm member(21), a middle arm member(22), and a top arm member(23). Process chambers(301-303) are formed by a processing container of a vacuum process module.</p> |
