| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate conveyance robot which is used in vacuum processing equipment, in which the joint portion of a robot arm includes a journaling hole formed at one arm member and vertically put through, a bearing mounted in the journaling hole, and a spindle fixed to the other arm and inserted into the bearing, and which can prevent contamination in the vacuum processing equipment caused by dust generated at the bearing. <P>SOLUTION: A cover 7 covering a journaling hole 51 from below is detachably fixed to the lower surface of one arm member 31<SB POS="POST">1</SB>. A spindle 53 has an upper shaft 53a projected to the upper part of the other arm member 32<SB POS="POST">1</SB>, and when a cylindrical portion 54 mounted with an upper bearing 55 into which the upper shaft 53a is inserted is provided at one arm member 31<SB POS="POST">1</SB>, a flange 57a having a rising portion 57b at the outer periphery is formed at the lower end of a collar 57 interposed between the inner ring of the upper bearing 55 and the other arm member 32<SB POS="POST">1</SB>. <P>COPYRIGHT: (C)2013,JPO&INPIT |
