IN-LINE FILM-FORMING APPARATUS, METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM, AND GATE VALVE

摘要

Provided is an in-line film-forming apparatus capable of opening and closing a gate valve at a high speed while preventing the occurrence of vibration due to the opening and closing of the gate valve. In the in-line film-forming apparatus, immediately before a piston (114) in a cylinder (115) reaches an end in one direction, a second on-off valve (117a) is completely closed and air is exhausted only by a second flow rate-adjusting valve (117b). Immediately before the piston (114) in the cylinder (115) reaches an end in the other direction, a first on-off valve (116a) is completely closed and air is exhausted only by a first flow rate-adjusting valve (116b). In this way, it is possible to reduce impact due to the contact between the end of the cylinder (115) and the piston (114) and prevent the occurrence of vibration.